"Atomistic Silicon Kinetic monte carlo Modeling for microElectronics"
Synopsys, Inc. is one of the largest companies in the Electronic Design Automation Industry, and the leader in the field of Technology Computer Assisted Design (TCAD). Its headquarters are place in Mountain View, considered for many to be the capital of Silicon Valley in California, USA.
Among Synopsys many solutions for the simulation of the whole processing of microprocessor fabrication, Sentaurus Process KMC plays a significant role in advancing the state-of-the-art for the modeling of diffusion, clustering, activation, segregation and phase change effects of dopants and impurities in silicon and silicon alloys. In particular, it is an atomistic technique that deals with the individual defects in the material assigning them rates for its different physical mechanisms and allowing them to react and form new defects. It can be used as a regular simulation tool, and also to explore the physics of the extremely complex mechanisms involved during microelectronic processing, allowing the design and optimization of future microelectronic devices.
The Atomistic Materials Modeling group at IMDEA Materials will support Synopsys in this task of implementing and adapting diffusion, clustering, activation/deactivation and charge models in silicon and alloys using non lattice kinetic Monte Carlo (KMC). Lattice KMC will also be used to implement and adapt anisotropic models for phase transitions between amorphous and crystalline silicon (Solid Phase Epitaxial Regrowth or SPER), and to simulate Selective Epitaxial Growth (SEG) of these materials. Finally, the team lead by Dr. Martin-Bragado will help delivering solutions to improve computational algorithms in Sentaurus Process KMC.
Funding Organization: Synopsys Inc, USA.
Industrial Sector: Microelectronics
Project Period: 2011 – 2013
Principal Investigator: Dr. Ignacio Martin-Bragado