External use of SEM

DESCRIPTION OF THE EQUIPMENT

Field Emission Scanning Electron Microscope (FE-SEM) Thermo Fisher Scientific Apreo 2S LoVac.

The microscope is equipped with a NiCol electron column with immersion lens and beam deceleration capabilities. Everhart-Thornley Detector (ETD), in-lens Trinity Detector System (T1,T2,T3), retractable backscatter detector (CBS/ABS), low-vacuum detector (LVD) and GAD-CBS/ABS for low vacuum mode.

Low vacuum mode with pressures ranging 10 – 500 Pa for visualisation of non-conducting samples without any metal coating.

Oxford integrated EBSD-EDS System with Symmetry CMOS Detector for crystalline and structural analysis and UltimMax40 SDD EDS detector for elemental composition analysis. Software Maps 3 for large area mapping and correlative microscopy.

Rocking Beam Mode for ECCI (Electron Channelling Contrast Imaging) for revealing dislocations and
other crystalline defects.

Electron beam resolution (ideal sample, optimal working distance):

High vacuum, field-free mode	High vacuum, immersion mode	Low vacuum,field-free mode
15 kV 1.0 nm	15 kV 0.7 nm	15 kV 1.2 nm
1 kV 0.9 nm	1 kV 1.0 nm	3 kV 1.8 nm

Available Detectors:

	Hi Vac Mode	Low Vac Mode
Secondary Electrons	ETD, T2 & T3 (In-lens)	LVD (Low Vac Detector)
Backscattered Electrons	BS & ABS (retractable) T1 (In-lens)	CBS & ABS (retractable) GAD-CBS/ABS

CONTACT:

Dr. Manuel Avella (manuel.avella@imdea.org)

PRICES:

EQUIPMENT	S. EXT. PUBLIC	S. EXT. PRIVATE
R-02170 – FEG-SEM Apreo 2S LoVac	100,00	150,00