IMDEA Materials Institute logo (size is 50 µm x 40 µm) fabricated using a FIB-FEGSEM dual beam microscope
A FIB-FEGSEM Dual-beam microscope is now available at IMDEA Materials Institute. The system (Helios NanoLab 600i, FEI) is fully equipped with STEM detector, X-Ray microanalysis (EDS) and electron backscatter diffraction (EBSD) for 3-D microstructural, chemical and crystallographic orientation analysis. The system is also suited for site-specific TEM sample preparation, micro machining and patterning by ion-beam milling.