- A high-resolution Schottky FEG field emission SEM with an Elstar™ column.
- A Ga⁺ FIB system, Tomahawk™, for micromachining and sample modification.
It includes multiple detectors for different signals:
SE, secondary electrons: Everhart-Thornley and in-lens TLD
CBS, backscattered electron detector with concentric sectors
ICE detector, secondary ions and electrons
STEM detector: BF/DF/HAADF
EDS, Energy Dispersive Spectroscopy: Oxford X-MaxN 20
EBSD, electron backscatter diffraction: Oxford Nordlys nano
Motorized 5-axis stage with continuous 360° rotation, tilt range of −10° to 60°, and repeatability of ~1 µm.
Nanometric manipulator, ~10 nm, for lamella extraction.
SEM specifications:
Acceleration voltage | Resolution | Operating modes |
| ~0.35 – 30 kV | ~0.9 nm @ 15 kV ~1.4 nm @ 1 kV | Standard (Field free) Inmersión (ultra alta resolución) Deceleración de haz |
FIB specifications: Ga⁺ ion beam, liquid metal.
Acceleration voltage | Beam current | Resolution |
| ~0.5 – 30 kV | hasta ~65 nA | ~4 nm @ 30 kV |
SERVICES:
It offers materials analysis services for metals, polymers, semiconductors, biomaterials, and more.
- High-resolution imaging
- EDS and EBSD analysis
- Cutting and preparation of lamellae for TEM
- APT sample preparation
- Precision milling, nanomachining
- Cross-section preparation
- Micropillar fabrication
- Nanoprototyping and other patterning processes
- Beam-induced Pt deposition, IBID/EBID
- 3D reconstruction:
- slice-and-view
- 3D EBSD
CONTACT:
Dr. Manuel Avella (manuel.avella@imdea.org)
PRICES:
The following table lists the rates for external services related to the FEI Helios NanoLab 600i FIB-FEGSEM equipment. The rates listed correspond to the hourly charge for use of the equipment.
| EQUIPMENT | PUBLIC RESEARCH ORGANIZATIONS | COMPANIES |
Microscopio FIB-FEGSEM Helios NanoLab 600i (Modo GA-Ion milling) | 150,00 € | 225,00€ |
Microscopio FIB-FEGSEM Helios NanoLab 600i (Modo SEM, EDX, EBSD) | 100,00 € | 150,00€ |
