Zhang, Xiao-Shan; Yang, Ling-Wei; Liu, Hai-Tao; Zu, Mei
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Nanostructuring of Ultra-Thin HfO(2) Layers for High-k/III-V Device Application
Benedicto, M.; Anguita, J.; Alvaro, R.; Galiana, B.; Molina-Aldereguia, J. M.; Tejedor, P.
